Sputtering system, 6(3) Target assemblies: Conmag IIStation 1: Heated etch with AE RF-10 power suppliesStation 2: Heater table with conmag IIStation 3: Heater table with conmag IIStation 4: Heater table with conmag II(4) Temperature controllers: EUROTHERM 818Controller: FLUKE 1722A modified with flash drive and floppy driveMultimeter: AGILENT HP HEWLETT-PACKARD KEYSIGHT 3438AFerrofluidic transfer plate feedthru grade(3) Ferrofluidic shutter feedtrhu upgradesIon gauge controller: VARIAN 880Remote power supply panel, digital readoutEtch matching unit controller with digital readout metersRF RWD REFL Remote meter panelCryo pump: CTI CT-8 with SC compressorDoes not include dry scroll mechanical pumpPower supplies:Target 1: inner 2.5kW, outer 12kWTarget 2: inner 2.5kW, outer 12kWTarget 3: inner 2.5kW, outer 12kW 1989 vintage.